CAS No.: | 2551-62-4 |
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Formula: | Sf6 |
EINECS: | 219-854-2 |
Constituent: | Industrial Pure Air |
Grade Standard: | Electronic Grade |
Chemical Property: | Non-Flammable Gas |
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Sulfur hexafluoride(Esaflon,hexafluoruredesoufre) is a colorless, odorless, nontoxic, nonflammable gas at room temperature and pressure. Sulfur hexafluoride is slightly soluble in water and oil.
SH6 , Assay% | ≥99.9 | 99.999 | ||||||||
N2, ppm | ≤3 | 3 | ||||||||
O2+Ar , ppm | ≤3 | 3 | ||||||||
CO ,ppm | ≤0.5 | 0.5 | ||||||||
CO2 ,ppm | ≤0.5 | 0.5 | ||||||||
CF4 ,ppm | ≤0.5 | 0.5 | ||||||||
CH4 ,ppm | ≤0.2 | 0.2 | ||||||||
H2O ,ppm | ≤2 | 2 | ||||||||
Acidity(As HF) ,ppm | ≤0.3 | 0.3 |
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